Design, Fabrication and Characterization of a High-Speed, Bimodal, CMOS-MEMS Resonant Scanner Driven by Temperature-Gradient Actuators

Hdl Handle:
http://hdl.handle.net/11285/572517
Title:
Design, Fabrication and Characterization of a High-Speed, Bimodal, CMOS-MEMS Resonant Scanner Driven by Temperature-Gradient Actuators
Authors:
Camacho León, Sergio ( 0000-0002-5996-9997 )
Issue Date:
2010-05-01
Discipline:
Ingeniería y Ciencias Aplicadas / Engineering & Applied Sciences
Appears in Collections:
Ciencias Exactas

Full metadata record

DC FieldValue Language
dc.contributor.authorCamacho León, Sergioen
dc.date.accessioned2015-08-17T11:34:14Zen
dc.date.available2015-08-17T11:34:14Zen
dc.date.issued2010-05-01en
dc.identifier.urihttp://hdl.handle.net/11285/572517en
dc.language.isoenen
dc.rightsOpen Accessen
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/*
dc.titleDesign, Fabrication and Characterization of a High-Speed, Bimodal, CMOS-MEMS Resonant Scanner Driven by Temperature-Gradient Actuatorsen
dc.typeTesis de Doctoradoes
dc.contributor.departmentTecnológico de Monterrey, Campus Monterreyen
dc.subject.disciplineIngeniería y Ciencias Aplicadas / Engineering & Applied Sciencesen
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